SCANNING ELECTRON MICROSCOPE HAVING LENGTH MEASURING FUNCTION AND SAMPLE DIMENSION LENGTH MEASURING METHOD

摘要

A scanning electron microscope having a function of measuring a length with a reduced variation of the measured length value due to the pattern shape of a measurement object and with an improved precision of length measurement, and a sample dimension measuring method are provided. The scanning electron microscope (100) having a function of measuring a length comprises an electron gun (1) emitting an electron beam, a measurement object region setting section (50) for setting a measurement region of a pattern formed on a sample, a storage section for recording a specified measurement region, a beam blanker section (11) for controlling application of the electron beam depending on the measurement region, and a control section (20) for extracting the specified measuring region from the storage section, allowing the beam blanker section to cut off the electron beam for the other region than the measurement region and to pass the electron beam for the measurement region and apply the electron beam to the sample, and acquiring the image of the measurement region to measure the length of the pattern. The measurement region can be a pair of measurement regions, and the areas of the measurement regions can be the same.