AUTOMATIC CONTINUOUS PLASMA CLEANING APPARATUS AND THEREOF CLEANING METHOD

摘要

An automatic continuous plasma cleaning apparatus and a cleaning method thereof are provided to perform continuously targets by processing the targets in safekeeping member units. A plurality of safekeeping members(S) have a plurality of open sides into which a plurality of substrates are loaded. A loading conveyer(100) of an endless track type is formed to move the safekeeping member to a loading position. An unloading conveyer(300) has the same structure as the structure of the loading conveyer in order to transfer the safekeeping member to an end position. A plurality of processing units(200) are installed between the loading conveyer and the unloading conveyer. Each of the processing units includes a plasma generator, a reaction chamber having an open side, a station installed in the inside of the reaction chamber, a door for opening and closing the open side of the reaction chamber, and a door switch connected to the door. A two-shaft robot arm is moved in an X-axis direction and a Y-axis direction in order to move the safekeeping member from the loading position to the station of the processing unit or from the station to the end position.