FLUID TRANSPORTATION DEVICE

摘要

[PROBLEMS] To provide a small fluid transportation device for transporting fluid efficiently through a simple structure. [MEANS FOR SOLVING PROBLEMS] A fluid transportation device comprises a substrate (10), and a disc like piezoelectric element (20) arranged displaceably on the substrate. A plurality of circular split electrodes (23a-23e) are formed concentrically on the piezoelectric element (20), and annular wavelike bending deformation is generated in the piezoelectric element (20) by applying voltages (E1-E4), respectively, to the split electrodes while shifting the phases. Fluid is transported from the outer circumferential part to the central part by moving an annular pocket chamber generated between the piezoelectric element (20) and the substrate (10) in the radial direction and then the fluid is discharged from the central part.