| 发明名称 |
FLUORINE-CONTAINING COPOLYMER, METHOD FOR PRODUCING THE SAME AND RESIST COMPOSITION CONTAINING THE SAME |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a fluorine-containing polymer having a high functional-group concentration and high transparency in a wide wavelength range, to provide a method for producing the same and to obtain a resist composition using the fluorine-containing polymer. <P>SOLUTION: The fluorine-containing copolymer has a unit derived from a monomer unit obtained by subjecting a fluorine-containing diene represented by formula (1): CF<SB>2</SB>=CFCH<SB>2</SB>CH(C(CF<SB>3</SB>)<SB>2</SB>(OR<SP>3</SP>))(CH<SB>2</SB>)<SB>n</SB>CR<SP>1</SP>=CHR<SP>2</SP>to cyclic polymerization and a monomer unit obtained by polymerizing an acrylic monomer having a specific structure. <P>COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2008214362(A) |
申请公布日期 |
2008.09.18 |
| 申请号 |
JP20060012128 |
申请日期 |
2006.01.20 |
| 申请人 |
ASAHI GLASS CO LTD |
发明人 |
YOKOKOJI OSAMU;SASAKI TAKASHI |
| 分类号 |
C08F236/20;C08F220/10;G03F7/039;H01L21/027 |
主分类号 |
C08F236/20 |
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