| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for holding a disk-shaped object safely without damaging the object by a highly reliable method irrespective of the edge shape of the object. SOLUTION: The device for holding a disk-shaped object, in particular a semiconductor wafer 12, includes three or more of contact elements 18 for supporting and/or fastening the disk-shaped object at its circumferential edge region 22. One or more of the contact elements 18 are arranged to be movable. COPYRIGHT: (C)2008,JPO&INPIT |
