MULTI-WIRE SAW AND SLURRY SUPPLY METHOD

摘要

PROBLEM TO BE SOLVED: To supply slurry to a wire of a multi-wire saw to have uniform adhesion amount. SOLUTION: This multi-wire saw is provided with a slurry supply part to supply slurry 33 including abrasive grains to the wire 25. The slurry supply part has: slurry supply containers 29 arranged at upstream and downstream positions of a wire moving direction in relation to a slicing position; a slurry tray 42 arranged in a lower region of the slicing position to receive the flowing and dropping slurry 33; and a slurry circulating route connected to the slurry supply container 29 and the slurry tray 42 to circulate and supply the slurry so that the slurry of prescribed mount or more may be accumulated in the slurry supply container 29. The slurry supply container 29 has a pair of opening parts 30 to discharge the slurry delivered from the slurry circulating route on upstream side and downstream side of the wire moving direction. By passing the wire 25 through the pair of opening parts 30 and passing the wire 25 through the slurry 35 in the slurry supply container 29, the slurry 33 is attached to the wire 25. COPYRIGHT: (C)2008,JPO&INPIT