发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of mixedly mounting two kinds of transistors having mutually and substantially different operating voltages on a substrate having a band gap larger than that of a silicon substrate. SOLUTION: The semiconductor device has: a first transistor formed on an SiC substrate 1; a first interlayer dielectric 11 formed at an upper part of the first transistor and the SiC substrate 1; and a crystallization silicon film 20 formed on the first interlayer dielectric 11; and a second transistor formed on the crystallization silicon film 20. An operating voltage of the first transistor is, for example, 100-1,000 V, and that of the second one is, for example, 3-5 V. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008218786(A) 申请公布日期 2008.09.18
申请号 JP20070055371 申请日期 2007.03.06
申请人 SEIKO EPSON CORP 发明人 WADA KOICHI
分类号 H01L21/8234;H01L21/20;H01L21/336;H01L27/00;H01L27/08;H01L27/088;H01L29/786 主分类号 H01L21/8234
代理机构 代理人
主权项
地址