| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device and a surface inspection method capable of inspecting the inspection object surface on which recesses and protrusions are formed, easily and highly accurately with a simple constitution. SOLUTION: This device includes (a) a light emitting part 14 for irradiating the inspection object 2 surface 2a with a light flux 15a from an oblique direction, and moving an irradiation position 15s linearly, (b) a light receiving part having a light receiving window 16s extending linearly oppositely to the irradiation position 15s on the same side as the light emitting part 14 relative to the inspection object 2, for detecting intensity of a light flux component passing the light receiving window 16s, and (c) a determination part for determining the quality of the irradiation position 15s on the inspection object 2 surface 2a based on the intensity of the light flux component detected by the light receiving part. The light receiving window 16s is widened so that the light flux 15a is regularly reflected by the inspection object 2 surface 2a as the light flux component, and that the whole regularly-reflected light 15b whose direction is fluctuated by the recesses and protrusions formed on the inspection object 2 surface 2a can pass the window. COPYRIGHT: (C)2008,JPO&INPIT
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