| 摘要 |
PROBLEM TO BE SOLVED: To realize a constitution of a vibrator structure, which avoids influence of an unnecessary vibration mode to vibrator characteristics in a manner free from influence to fundamental frequency. SOLUTION: The vibration structure includes: a substrate 10; a fixed electrode 12 formed on the substrate; and a movable electrode 14 oppositely provided across a gap 17 to the fixed electrode and supported on a fixed part 15 formed on the substrate via a support beam 16, and is structured to cause the movable electrode to vibrate by generating electrostatic force between the fixed electrode and the movable electrode. The movable electrode has a region A structured in a plate having a substantially uniform thickness and a step 14x extending in a planar direction within the region. COPYRIGHT: (C)2008,JPO&INPIT
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