Plasma treatment process for substrate surfaces involves use of inert working gas such as argon or nitrogen or mixture of these

摘要

The plasma treatment process involves the use of an inert gas, such as argon or nitrogen, or a mixture of such gases, as the working gas (2). After the ignition of the barrier charge, filaments are created outside the active discharge zone of the plasma jet (1). The flow of working gas and the filaments formed are forced into a form which enables the greatest surface of the substrate (6) being treated to be covered.