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经营范围
发明名称
HYDRID VPE REAKTOR UND VERFAHREN
摘要
申请公布号
DE50310291(D1)
申请公布日期
2008.09.18
申请号
DE20035010291
申请日期
2003.10.02
申请人
AIXTRON AG
发明人
KAEPPELER, JOHANNES
分类号
C30B25/14;C23C16/30;C23C16/44;C23C16/448;C23C16/455;C30B25/02;C30B25/08
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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