发明名称 |
SCANNING PROBE APPARATUS WITH IN-SITU MEASUREMENT PROBE TIP CLEANING CAPABILITY |
摘要 |
A scanning probe apparatus includes a measurement probe tip and an auxiliary probe tip that is movably positionable with respect to the measurement probe tip. The measurement probe tip and the auxiliary probe tip may be positioned juxtaposed, so that an electrical discharge may be effected between the measurement probe tip and auxiliary probe tip to remove a contaminant from the measurement probe tip. The auxiliary probe tip may be integral with a sample support plate within the scanning probe apparatus. |
申请公布号 |
US2008223118(A1) |
申请公布日期 |
2008.09.18 |
申请号 |
US20070687033 |
申请日期 |
2007.03.16 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ZHOU LIN;SHNEYDER DMITRIY |
分类号 |
G01B5/28;G01Q30/18 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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