| 摘要 |
A semiconductor device including a capacitor which includes a first electrode, a second electrode, and a dielectric layer disposed between the first electrode and the second electrode, the dielectric layer including: a first paraelectric film formed of a material containing a first metal element and at least one kind of second metal element; a second paraelectric film disposed between the first electrode and the first paraelectric film; and a third paraelectric film disposed between the second electrode and the first paraelectric film, wherein the second paraelectric film is formed of a material containing the first metal element but substantially not containing the second metal element, and the third paraelectric film is formed of a material containing the first metal element but substantially not containing the second metal element.
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