SEMICONDUCTOR SUBSTRATE TEMPERATURE MEASURING DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING DEVICE INCLUDING IT, TEMPERATURE MEASURING METHOD FOR SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To measure a temperature of a semiconductor substrate with high accuracy and high reproducibility. SOLUTION: An MBE device 20 acting as a semiconductor device manufacturing device including a semiconductor substrate temperature measuring device is provided with a substrate temperature calculating device 11 which calculates a temperature of a substrate 2 based on a spectrum of scattered light scattered by the substrate 2 in the semiconductor substrate temperature measuring device which measures a temperature of a semiconductor substrate. The substrate temperature calculating device 11 compensates the temperature of the substrate 2 calculated based on the spectrum of the scattered light, based on a dopant concentration of the substrate 2. COPYRIGHT: (C)2008,JPO&INPIT