| 摘要 |
PROBLEM TO BE SOLVED: To detect even a defect of a substrate incapable of being detected by an array inspection device of a conventional structure. SOLUTION: This TFT array inspection device detecting a defect of a substrate by detecting it by selecting, in terms of energy, secondary electrons obtained by irradiating the substrate with an electron beam is provided with an energy filter carrying out energy selection, and a secondary electron detector detecting secondary electrons having passed through the energy filter. The energy filter has at least two grids, and voltages different from each other are applied to the respective grids. COPYRIGHT: (C)2008,JPO&INPIT
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