| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of inspecting accurately a wiring pattern formed on a circuit board. SOLUTION: This inspection device 11 capable of inspecting the wiring pattern 3 for connecting a bump 1 formed on the circuit board 5 to an external connection terminal 2 is equipped with a charging device 12 for charging the bump 1; a discharge gap 16 connected to the external connection terminal 2, for discharging the charge charged in the bump 1 via the wiring pattern 3; and a processing part 19 for measuring a discharge current I1 flowing in the wiring pattern 3 by discharging, and inspecting the wiring pattern 3 based on the discharge current I1 measured. COPYRIGHT: (C)2008,JPO&INPIT
|
