SENSOR UNIT AND MICROREACTOR SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a sensor unit capable of accurately measuring the state amount of a fluid in a case that a plurality of kinds of the state amounts of the fluid are measured on the inlet side or/and output side of a microreactor device. SOLUTION: The sensor unit for the microreactor device is equipped with a flow channel forming member, which has a flow channel therein and is constituted so that a plurality of the respective sensor installation holes communicating with the flow channel are provided in the peripheral direction of the wall surface of the low channel at the fluid measuring position in the flow channel, and a plurality of kinds of the sensors constituted so that response parts are arranged to a plurality of the respective sensor installation holes toward the flow channel to detect the state amount of the fluid at the fluid measuring position. COPYRIGHT: (C)2008,JPO&INPIT