摘要 |
PROBLEM TO BE SOLVED: To provide a plurality of micro-movers regulated to move in reverse directions so as to give dynamical balance to an MEMS driving type information memory system. SOLUTION: Each of pairs of plates (41, 42, 43, 44) is related to the micro-mover so that one of each of the pairs of the plates (41, 42, 43, 44) moves against the other plate. A first plate 41a of the first pair 41 of the plates is made to move in a first direction W by a first momentum. A second plate 42a of the second pair 42 of the plates is made to move in a direction E opposite to the first direction by a second momentum roughly equal to the first momentum. Movement of the first and the second plates is constituted so as to roughly set off the first and second momenta. COPYRIGHT: (C)2008,JPO&INPIT
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