发明名称 Fabricating a Set of Semiconducting Nanowires, and Electric Device Comprising a Set of Nanowires
摘要 The method of fabricating a set of semiconducting nanowires ( 10 ) having a desired wire diameter (d) comprises the steps of providing a set of pre-fabricated semiconducting nanowires ( 10 '), at least one pre-fabricated semiconducting nanowire having a wire diameter (d') larger than the desired wire diameter (d), and reducing the wire diameter of the at least one pre-fabricated nanowire ( 10 ') by etching, the etching being induced by light which is absorbed by the at least one pre-fabricated nanowire ( 10 '), a spectrum of the light being chosen such that the absorption of the at least one pre-fabricated nanowire being significantly reduced when the at least one pre-fabricated nanowire reaches the desired wire diameter (d). The electric device ( 100 ) may comprise a set of nanowires ( 10 ) having the desired wire diameter (d). The apparatus ( 29 ) may be used to execute the method according to the invention.
申请公布号 US2008224115(A1) 申请公布日期 2008.09.18
申请号 US20040584037 申请日期 2004.12.03
申请人 BAKKERS ERIK PETRUS ANTONIUS MARIA;FEINER LOUIS FELIX;BALKENENDE ABRAHAM RUDOLF 发明人 BAKKERS ERIK PETRUS ANTONIUS MARIA;FEINER LOUIS FELIX;BALKENENDE ABRAHAM RUDOLF
分类号 H01L29/00;C01B31/02;C23F1/00;G01N33/543;H01L21/302 主分类号 H01L29/00
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