发明名称 |
Fabricating a Set of Semiconducting Nanowires, and Electric Device Comprising a Set of Nanowires |
摘要 |
The method of fabricating a set of semiconducting nanowires ( 10 ) having a desired wire diameter (d) comprises the steps of providing a set of pre-fabricated semiconducting nanowires ( 10 '), at least one pre-fabricated semiconducting nanowire having a wire diameter (d') larger than the desired wire diameter (d), and reducing the wire diameter of the at least one pre-fabricated nanowire ( 10 ') by etching, the etching being induced by light which is absorbed by the at least one pre-fabricated nanowire ( 10 '), a spectrum of the light being chosen such that the absorption of the at least one pre-fabricated nanowire being significantly reduced when the at least one pre-fabricated nanowire reaches the desired wire diameter (d). The electric device ( 100 ) may comprise a set of nanowires ( 10 ) having the desired wire diameter (d). The apparatus ( 29 ) may be used to execute the method according to the invention.
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申请公布号 |
US2008224115(A1) |
申请公布日期 |
2008.09.18 |
申请号 |
US20040584037 |
申请日期 |
2004.12.03 |
申请人 |
BAKKERS ERIK PETRUS ANTONIUS MARIA;FEINER LOUIS FELIX;BALKENENDE ABRAHAM RUDOLF |
发明人 |
BAKKERS ERIK PETRUS ANTONIUS MARIA;FEINER LOUIS FELIX;BALKENENDE ABRAHAM RUDOLF |
分类号 |
H01L29/00;C01B31/02;C23F1/00;G01N33/543;H01L21/302 |
主分类号 |
H01L29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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