ACCELERATION SENSOR

摘要

An acceleration sensor having a fixed section adapted to be fixed to an object to be detected, a flexible section connected to the fixed section, a weight section connected to the fixed section via the flexible section, a first facing electrode section, and a second facing electrode section. The first facing electrode section includes a first electrode provided on the weight section and a second electrode spaced from and facing the first electrode, and forms a first capacitance. The second facing electrode section includes a third electrode provided on the weight section and a fourth electrode spaced from and facing the third electrode, and forms a second capacitance. The first electrode and the third electrode are arranged in a first direction. The second electrode and the fourth electrode are spaced and face the first and third electrodes, respectively, in a second direction perpendicular to the first direction. A component in the first direction of acceleration of the object to be detected is detected based on the first and second capacitances. Control voltages are applied to the first and second facing electrode sections. When both the first and second capacitances become small and when both the first and second capacitances become large, the control voltages are changed. The acceleration sensor can detect acceleration at high accuracy.