| 摘要 |
An angular rate sensor includes a plurality of spaced apart vibrating beams, for example, four beams, defining a pair of outer beams and a pair of inner beams. Each outer beam is mechanically coupled to an inner beam by way of an interconnecting member. The outer beams are excited to cause them to vibrate in the plane of the beams and 180 degrees out of phase with the inner beams. In order to compensate for bias errors due to geometric mismatches between the beams, electrode patterns are deposited on the beams up to the point of inflection of the beam during vibration. The electrodes enable an electric field to be applied either parallel or normal to the longitudinal axis of the drive beams, which, in turn, cause the beams to twist about their longitudinal axis. Such twisting forces the quadrature acceleration components to cancel and thus electrically compensates for such bias errors due to quadrature acceleration components.
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