| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to rapidly rise and lower temperature and to improve durability. SOLUTION: The heat treating furnace 2 is equipped with a processing container 3 that houses and thermally treats a workpiece w and a cylindrical heater 5 that is provided to surround the processing container 3 and heat the workpiece w. The heater 5 is provided with a cylindrical thermal insulator 16, grooved shelf portions 17 that are formed at multi-step in the axial direction on the inner circumference of the thermal insulator 16, and a spiral heating resistance wire 18 that is arranged along each of the shelf portions 17. The thermal insulator 16 is provided with a pin 20 that can move the heating resistance wire 18 at appropriate spacing in the radial direction of the heater 5 and hold it not to fall from the shelf portion 17. COPYRIGHT: (C)2008,JPO&INPIT
|
