| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid crystal device by which reliability of the liquid crystal device can be enhanced by reliably washing a formed inorganic alignment layer without using water or an aqueous solution while inexpensively taking measures to prevent electrification in a simple manner. SOLUTION: The manufacturing method of the liquid crystal device includes steps S1 and S3 for forming inorganic alignment layers on each pixel electrode and a counter electrode on a TFT substrate and a counter substrate and steps S2 and S4 for supplying liquefied nitrogen to the inorganic alignment layers to wash the inorganic alignment layers. COPYRIGHT: (C)2008,JPO&INPIT
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