| 发明名称 |
RF SENSOR FOR USE IN PLASMA PROCESSING TOOLS |
| 摘要 |
A high-performance miniature RF sensor that maintains gain, directivity, and isolation in a miniature package. The miniature RF sensor includes stacked current and voltage pickups disposed in a PCB construction, the sensor further including quarter wave transforming filter, triaxial shielding, and skin-effect filtering. |
| 申请公布号 |
WO2007109276(A3) |
申请公布日期 |
2008.09.18 |
| 申请号 |
WO2007US06921 |
申请日期 |
2007.03.20 |
| 申请人 |
INFICON, INC.;GARVIN, CRAIG;BONNER, MICHAEL;ROSYS, KENNETH |
发明人 |
GARVIN, CRAIG;BONNER, MICHAEL;ROSYS, KENNETH |
| 分类号 |
G01R27/26 |
主分类号 |
G01R27/26 |
| 代理机构 |
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代理人 |
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