| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for forming a barrier film, which can prevent a carbon film from depositing on an internal electrode and an exhaust path and can reduce a time loss. SOLUTION: The apparatus 10A for forming the barrier film is directed at forming the barrier film on the inner surface of a plastic container 12, by inserting the internal electrode 17 into the plastic container 12, supplying a source gas G into the plastic container 12, preparing an external electrode 13 in the outside of the plastic container 12, and generating discharge plasma in the inside of the plastic container 12. The method for preventing the barrier film from forming on the inner surface of the exhaust path 15 and the internal electrode 17 includes installing a diluent gas supply means 30A which introduces a diluent gas 31 for inhibiting the formation of the barrier film into the exhaust path 15 while forming the barrier film on the inner surface of the plastic container 12, and generating a plasma atmosphere in the exhaust path 15, which is different from a plasma atmosphere generated in the plastic container 12 because the source gas G is diluted with the diluent gas 31. COPYRIGHT: (C)2008,JPO&INPIT
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