| 摘要 |
In another embodiment, the invention provides a compound semiconductor field effect transistor having a fin structure. A first layer is formed on or above a substrate, wherein the first layer contains a first compound semiconductor material. A second layer is formed on the first layer, wherein the second layer comprises a second compound semiconductor material. A third layer is formed on the second layer, wherein the third layer comprises a third compound semiconductor material. A cap layer is formed on at least one partial region of the third layer, wherein the cap layer comprises a fourth compound semiconductor material. The second layer, the third layer and the cap layer are patterned in such a way that a fin structure is formed. A first source/drain region is formed from a first partial region of the cap layer, and a second source/drain region is formed from a second partial region of the cap layer. A gate region is formed on at least one partial region of at least one sidewall of the fin structure and/or on a partial region of an upper surface of the third layer.
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