| 发明名称 |
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| 摘要 |
<p>Electrification is suppressed with a water-soluble electrification-suppressing film having an electron conductivity and comprising a polymer resin. A high electrification-suppressing effect which is also high in vacuum can be easily obtained by using the electrification-suppressing film with less contamination.</p> |
| 申请公布号 |
JP2902727(B2) |
申请公布日期 |
1999.06.07 |
| 申请号 |
JP19900138467 |
申请日期 |
1990.05.30 |
| 申请人 |
HITACHI SEISAKUSHO KK;SHOWA DENKO KK |
发明人 |
MURAI FUMIO;SUZUKI YASUNORI;TOMOSAWA HIDEKI;KO RYUMA;SAIDA YOSHIHIRO;IKENOE YOSHIAKI |
| 分类号 |
G21K5/04;C09D5/24;G03F7/038;G03F7/09;G03F7/11;G03F7/20;H01J37/305;H01J37/317;H01L21/027;H01L21/265;H01L21/266;H01L21/66;(IPC1-7):G03F7/11 |
主分类号 |
G21K5/04 |
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