MANUFACTURE OF SEMICONDUCTOR SILICON WAFER,申请号JP19980064173-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR SILICON WAFER
摘要
申请公布号	JPH11251270(A)	申请公布日期	1999.09.17
申请号	JP19980064173	申请日期	1998.02.27
申请人	SHIN ETSU HANDOTAI CO LTD	发明人	TOYAMA KOHEI
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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