Chemical amplifying type positive resist composition,申请号KR20020002782-传众专利搜索

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发明名称	Chemical amplifying type positive resist composition
摘要
申请公布号	KR100858831(B1)	申请公布日期	2008.09.17
申请号	KR20020002782	申请日期	2002.01.17
申请人		发明人
分类号	G03F7/039;G03F7/004	主分类号	G03F7/039
代理机构		代理人
主权项
地址

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