TUBE STRUCTURE AND SEMICONDUCTOR MANUFACTURING APPARATUS WITH IT

摘要

A tube structure and a semiconductor manufacturing apparatus having the same are provided to prevent deformation due to high-temperature chemicals by forming a plurality of absorbing holes. A tube structure(120) is inserted into a process chamber for storing high-temperature chemicals. One end of a tube is connected to a circulation line for circulating the chemicals. The other end of the tube is positioned at a predetermined interval apart from a bottom surface of the process chamber in order to absorb the chemicals and to apply the chemicals to the circulation line. An input terminal(128) is formed at the other end of the tube in order to absorb the chemicals. A plurality of absorbing holes(124) are formed at an upper side of the input terminal in order to increase a chemical absorbing area.