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发明名称
摘要
申请公布号
JP4150548(B2)
申请公布日期
2008.09.17
申请号
JP20020231786
申请日期
2002.08.08
申请人
发明人
分类号
H01L21/306;H01L21/8238;H01L21/265;H01L21/28;H01L21/311;H01L21/316;H01L27/092;H01L29/51;H01L29/78
主分类号
H01L21/306
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