发明名称 Flood chamber for coating installations
摘要 <p>The chamber has two flooding units comprising flooding walls that include a set of fluid penetration openings. One flooding unit is arranged on one side of a plane substrate and the other flooding unit is arranged on the other side of the plane substrate. The flooding units are connected to a fluid source at a given fluid pressure. A portion of the fluid penetration openings is directed toward a substrate (11).</p>
申请公布号 EP1970467(A1) 申请公布日期 2008.09.17
申请号 EP20070104144 申请日期 2007.03.14
申请人 APPLIED MATERIALS, INC. 发明人 GEBELE, THOMAS;LOPP, ANDREAS;HEIMEL, OLIVER
分类号 C23C14/56;B65G49/06 主分类号 C23C14/56
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