发明名称 |
Flood chamber for coating installations |
摘要 |
<p>The chamber has two flooding units comprising flooding walls that include a set of fluid penetration openings. One flooding unit is arranged on one side of a plane substrate and the other flooding unit is arranged on the other side of the plane substrate. The flooding units are connected to a fluid source at a given fluid pressure. A portion of the fluid penetration openings is directed toward a substrate (11).</p> |
申请公布号 |
EP1970467(A1) |
申请公布日期 |
2008.09.17 |
申请号 |
EP20070104144 |
申请日期 |
2007.03.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
GEBELE, THOMAS;LOPP, ANDREAS;HEIMEL, OLIVER |
分类号 |
C23C14/56;B65G49/06 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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