Method and apparatus for optical measurement of the topography of a sample

摘要

The method involves measuring the illumination of a sample (2), which absorbs exposures of the sample in a form of a light (6) radiated from the sample with an optic (5) with limited depth of field. The focus point (F) of the optics is continuously displaced in relation to the sample. The image sensor (7) records images during the displacement process. An independent claim is also included for an apparatus for optical measurement of a topography of a probe.