发明名称 |
COATING LIQUID FOR FORMING LOW DIELECTRIC CONSTANT AMORPHOUS SILICA COATING FILM AND LOW DIELECTRIC CONSTANT AMORPHOUS SILICA COATING FILM OBTAINED FROM SUCH COATING LIQUID |
摘要 |
<p>A coating liquid for forming a low dielectric constant amorphous silica-based coating film with a dielectric constant of 3.0 or below and a film strength (Young's modulus) of 3.0 GPa or more, and also having a smooth surface with an excellent hydrophobicity. The coating liquid contains (1) a silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA) and alcoxysilane (AS) in the presence of tetraalkylammoniumhydroxide (TAAOH), or (2) a silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA), alcoxysilane (AS) and tetraalkylorthosilicate (TAOS) in the presence of tetraalkylammoniumhydroxide (TAAOH).</p> |
申请公布号 |
EP1970421(A1) |
申请公布日期 |
2008.09.17 |
申请号 |
EP20060834769 |
申请日期 |
2006.12.15 |
申请人 |
CATALYSTS & CHEMICALS INDUSTRIES CO., LTD. |
发明人 |
EGAMI, MIKI;ARAO, HIROKI;NAKASHIMA, AKIRA;KOMATSU, MICHIO |
分类号 |
C08G77/50;C01B33/12;C09D5/25;C09D183/04;C09D183/07;C09D183/08;C09D183/14;H01L21/312;H01L21/768 |
主分类号 |
C08G77/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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