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摘要
申请公布号
JP4152116(B2)
申请公布日期
2008.09.17
申请号
JP20020094753
申请日期
2002.03.29
申请人
发明人
分类号
H01L21/822;H01L21/8247;H01L27/04;H01L27/10;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/822
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