| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that a center point of rotation may be shifted because a moving side rigid part is supported by flexible beams of a radiation direction. <P>SOLUTION: A movable block 22, a shaft 29 and a moving stage are integrally fixed to form the moving side rigid part, and the shaft 29 is freely rotatably supported on a fixed side rigid part 16 through a bearing. The displacement of a piezoelectric actuator 21 is enlarged by a displacement enlarging mechanism 23 and is transmitted to the block 22, and the block 22 rotates by a prescribed angle centered on the shaft 29. <P>COPYRIGHT: (C)2003,JPO |
