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经营范围
发明名称
Lithographic projection apparatus
摘要
申请公布号
EP1411392(B1)
申请公布日期
2008.09.17
申请号
EP20030078292
申请日期
2003.10.17
申请人
ASML NETHERLANDS B.V.
发明人
KURT, RALPH;BAKKER, LEVINUS PIETER;SCHUURMANS, FRANK JEROEN PIETER
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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