发明名称 MOVING DEVICE FOR FRONT OPENING UNIFIED POD MAPPING APPARATUS
摘要 A moving device for front opening unified pod mapping apparatus is provided to reduce an error rate by preventing concentration of rotatory force on a shaft part. A main body(100) includes guiding holes(102) having a shape of semicircle and a shaft hole(101) formed at one side of the guiding holes. A mapping arm(110) includes a shaft part(120) fixed in the shaft hole of the main body and a protruded part(111) at a rear end around the shaft part. A cylinder(130) is positioned at a bottom part of the main body. A rod is formed at a front end of the cylinder. A mover(131) is connected to the rod of the cylinder. A guiding pin(135) is formed at a front end of the mover. The protruded part rotates the mapping arm around of the shaft part according to front and rear motion of the mover.
申请公布号 KR100858941(B1) 申请公布日期 2008.09.17
申请号 KR20070030840 申请日期 2007.03.29
申请人 KOREA TECHNO CO., LTD. 发明人 KIM, HO JIN;LEE, BO RA
分类号 H01L21/68;H01L21/67 主分类号 H01L21/68
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