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发明名称
丛聚式半导体制程装置
摘要
一种丛聚式半导体制程装置,包括晶圆处理腔,从晶圆处理腔的轴向来看,此晶圆处理腔具有多边形基底,此多边形基底包括多条配置给晶圆制程腔的边与两条配置给晶圆载入/卸载腔的相邻边。配置给晶圆制程腔的多条边中的两条相邻边之间的角A大于用360°除以边的总数而计算出的角B,其中边的总数包括配置给晶圆制程腔的多条边与配置给晶圆载入/卸载腔的两条相邻边。
申请公布号
TW200837866
申请公布日期
2008.09.16
申请号
TW097103290
申请日期
2008.01.29
申请人
日本ASM股份有限公司
发明人
泷泽正浩;诹访田雅荣;萩野崇
分类号
H01L21/67(2006.01);H01L21/677(2006.01)
主分类号
H01L21/67(2006.01)
代理机构
代理人
詹铭文;萧锡清
主权项
地址
日本
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