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发明名称
结合田口法及类神经网路建构近场光学微影线段加工的预测方法
摘要
一种结合田口法实验资料及类神经网路学之优点,以建立一套实验次数少、预测时间短及预测精度高的预测方法。本发明先以微影加工实验结果与近场光学微影加工理论模式之模拟结果的两者结果误差为目标函数,逆解出光纤探针之口径,再进一步进行田口实验。经过田口类神经网路模式之分析结果,证实了本发明所建构之田口类神经网路模式比以传统田口法实验资料当作训练例之网路可提供更为精确的预测结果,同时可改善传统类神经网路需大量训练例之缺点。本发明之田口类神经网路之预测模式,在近场光学微影线段加工应用上具有产业应用价值。
申请公布号
TW200837593
申请公布日期
2008.09.16
申请号
TW096107810
申请日期
2007.03.07
申请人
国立台湾科技大学
发明人
林荣庆;杨庆彬
分类号
G06F19/00(2006.01)
主分类号
G06F19/00(2006.01)
代理机构
代理人
詹铭文;萧锡清
主权项
地址
台北市大安区基隆路4段43号
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