发明名称 |
Inspecting method of elastic body, inspecting apparatus thereof, and dimension predicting program thereof |
摘要 |
In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoelectric/electrostrictive actuator, and the amount of displacement of the piezoelectric/electrostrictive actuator is predicted by the frequency response characteristics. The piezoelectric/electrostrictive actuator is precisely inspected without dissolution and destruction and without actual driving as a product. |
申请公布号 |
US7424827(B2) |
申请公布日期 |
2008.09.16 |
申请号 |
US20050115981 |
申请日期 |
2005.04.27 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
YAMADA TOMOHIRO;KOMAZAWA MASATO;HATTA TETSUYA;NEHAGI TAKATOSHI |
分类号 |
G01N29/036;G01H11/08;G01H13/00;G01N29/04;G01N29/12;G01N29/42;H01H57/00;H01L41/08;H01L41/09;H01L41/22 |
主分类号 |
G01N29/036 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|