| 摘要 |
A film formation apparatus for manufacturing a light emitting element is provided to reduce a diving voltage and extend a lifetime of an organic light emitting element by improving a carrier injection property between organic layers. A first alignment unit(401) is connected to a loading chamber(400). A first film formation unit(405) is connected to the first alignment unit and includes a plurality of first evaporation sources(406), a first holder(402), a first adhesion-resistant shield, and a first light source. A second alignment unit(407) is connected to the first film formation unit. A second film formation unit(408) is connected to the second alignment unit and includes a plurality of second evaporation sources, a second holder, a second adhesion-resistant shield, and a second light source. A third alignment unit(409) is connected to the second film formation unit. A third film formation unit(410) is connected to the third alignment unit and includes a plurality of third evaporation sources, a third holder, a third adhesion-resistant shield, and a third light source.
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