发明名称 |
Modulated reflectance measurement system with multiple wavelengths |
摘要 |
A modulated reflectance measurement system includes three monochromatic diode-based lasers. Each laser can operate as a probe beam or as a pump beam source. The laser outputs are redirected using a series of mirrors and beam splitters to reach an objective lens. The objective lens focuses the laser outputs on a sample. Reflected energy returns through objective and is redirected by a beam splitter to a detector. A lock-in amplifier converts the output of the detector to produce quadrature (Q) and in-phase (I) signals for analysis. A Processor uses the Q and/or I signals to analyze the sample. By changing the number of lasers used as pump or probe beam sources, the measurement system can be optimized to measure a range of different samples types.
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申请公布号 |
US7423757(B2) |
申请公布日期 |
2008.09.09 |
申请号 |
US20060492583 |
申请日期 |
2006.07.25 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
NICOLAIDES LENA;FANTON JEFFREY T.;SALNIK ALEX;OPSAL JON |
分类号 |
G01N21/55;G01N21/17;G01N21/63;G01N21/95 |
主分类号 |
G01N21/55 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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