On chip heating for electrical trimming of polysilicon and polysilicon-silicon-germanium resistors and electrically programmable fuses for integrated circuits

摘要

An integrated circuit programmable structure ( 60 ) is formed for use a trim resistor and/or a programmable fuse. The programmable structure comprises placing heating elements ( 70 ) in close proximity to the programmable structure ( 60 ) to heat the programmable structure ( 60 ) during programming.