发明名称 Composition and method for treating a semiconductor substrate
摘要 The invention relates to a method for cleaning semiconductor surfaces to achieve to removal of all kinds of contamination (particulate, metallic and organic) in one cleaning step. The method employs a cleaning solution for treating semiconductor surfaces which is stable and provokes less or no metal precipitation on the semiconductor surface.
申请公布号 US7422019(B2) 申请公布日期 2008.09.09
申请号 US20060476263 申请日期 2006.06.27
申请人 INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC)VZW 发明人 DE WAELE RITA;VOS RITA
分类号 B08B3/04;C11D3/02;C11D3/26;C11D3/30;C11D3/34;C11D7/26;C11D7/32;C11D7/34;C11D7/54;C11D11/00 主分类号 B08B3/04
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