发明名称 PLANAR HEATER
摘要 Provided is a planar heater having a substantially uniform heating temperature with a carbon wire heat generating body. The inner region and the outer region have different in-plane arrangement densities of carbon wire heat generating bodies (CW). A power supply terminal section having a connecting line for carrying electricity to a heat generating body (CW) is arranged at the center portion on the rear side of a silica glass board-like body. The connecting wire of the inner carbon wire heat generating body is connected at the center portion of the silica glass board-like body, the connecting lines (3a, 3b) of the outer carbon wire heat generating body are extended to the outer regions from the center portion of the silica glass board-like body, without crossing the inner carbon wire heat generating body (CW), and are connected with the outer carbon wire heat generating body (CW).
申请公布号 KR20080081360(A) 申请公布日期 2008.09.09
申请号 KR20087018780 申请日期 2007.02.07
申请人 COVALENT MATERIALS CORPORATION;TOKYO ELECTRON LIMITED 发明人 SHIBATA KAZUO;KAWASAKI HIROO;IWATA TERUO;AMIKURA MANABU
分类号 H05B3/20;H05B3/14;H05B3/56 主分类号 H05B3/20
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