发明名称 Method and system for selective optical pattern compensation
摘要 A method and system for making a photographic mask. The method includes determining a first contact area, processing information associated with the first contact area, and determining whether a first optical compensation should be applied to the first contact area based on at least information associated with the first contact area. Additionally, the method includes if the first optical compensation should be applied to the first contact area, applying the first optical compensation to the first contact area, processing information associated with first optical compensation, determining a first distance between the first optical compensation and a second optical compensation or a second contact area, processing information associated with the first distance, and adjusting the first optical compensation based on at least information associated with the first distance.
申请公布号 US7424700(B2) 申请公布日期 2008.09.09
申请号 US20050261455 申请日期 2005.10.27
申请人 SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION 发明人 KUO KUEI-CHI
分类号 G06F17/50 主分类号 G06F17/50
代理机构 代理人
主权项
地址