| 摘要 |
An acceleration sensor is provided to measure a wide range of accelerations by adjusting voltages applied on first and second electrodes. An acceleration sensor includes a substrate(110), a first electrode(120), a first insulation layer(130), a second electrode(140), a second insulation layer(150), and a conductive mass(160). The first electrode is formed on the substrate. The first insulation layer is formed on the first electrode. The second electrode is formed on the first insulation layer. The second insulation layer is formed on the second electrode. The conductive mass is formed on the second insulation layer and moved by an acceleration. Voltages are applied on the first and second electrodes and the conductive mass, such that a relative weight of the conductive mass is changed according to the acceleration range to be measured. |
