| 摘要 |
A method and an apparatus of manufacturing a probe card using a laser are provided to improve a manufacturing yield by enabling a user to simply replace a defective probe, instead of the probe card as a whole. An apparatus of manufacturing a probe card using a laser includes a loading chuck(10), a collet chuck(20), a substrate chuck(30), and a laser unit. The loading chuck fixes the probe in a horizontal sate on an upper surface thereof. The collet chuck receives the probe, which is fixed on the loading chuck, and fixes the probe on one surface thereof in an erection state. The substrate chuck fixes the substrate, on which the probe is to be bonded. The laser unit irradiates a laser on the probe to heat and bond the probe on the substrate. The loading chuck is rotated by 90 degrees, while the probe is fixed. |
