| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a glass substrate and the like which forms a stair-like step inexpensively and accurately on the glass substrate in a simplified process. SOLUTION: The manufacturing method for the glass substrate comprises: a first step of baking a glass base material 200, forming a first resist film 210a, forming a first resist pattern on the first resist film 210a, forming a first alignment mark, and forming a first step groove 9a by applying glass etching; a second step of baking the glass base material 200, forming a second resist film 210b, forming a second resist pattern in accordance with the first alignment mark, and forming a second step groove 9b, larger in a longitudinal direction than the first step groove 9a by applying glass etching; and a third step of forming grooves from the second step groove 9b to an nth step groove on the glass base material 200 by sequentially repeating the first and the second steps. COPYRIGHT: (C)2008,JPO&INPIT
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